D.S. Jun

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Journal article (1)

1 records found

Ion beams in SEM

An experiment towards a high brightness low energy spread electron impact gas ion source

Journal article (2011) - D.S. Jun (author), V.G. Kutchoukov (author), P. Kruit (author)

A next generation ion source suitable for both high resolution focused ion beam milling and imaging applications is currently being developed. The new ion source relies on a method of which positively charged ions are extracted from a miniaturized gas chamber where neutral gas at ...