Identification of an overactuated deformable mirror system with unmeasured outputs

Title

Identification of an overactuated deformable mirror system with unmeasured outputs

 Author

Tacx, Paul (Eindhoven University of Technology)
Habraken, Roel (Eindhoven University of Technology; TNO)
Witvoet, Gert (Eindhoven University of Technology; TNO)
Heertjes, Marcel (Eindhoven University of Technology; ASML)
Oomen, T.A.E. (TU Delft Team Jan-Willem van Wingerden; Eindhoven University of Technology)

Date

2024

 Abstract

Next-generation deformable mirrors are envisaged to exhibit low-frequency flexible dynamics and to contain a large number of spatially distributed actuators due to increasingly stringent performance requirements. The increasingly complex system characteristics necessitate identifying the flexible dynamic behavior for design validation and next-generation control. The aim of this paper is to develop a unified approach for the identification of mechanical systems with a large number of spatially distributed actuators and a limited number of sensors. A frequency domain-based approach using local modeling techniques is developed. The modal modeling framework is employed to analyze the design and create outputs that were not measured. The proposed approach is applied to an experimental deformable mirror case study that illustrates the effectiveness of the proposed approach.


 Subject

Adaptive optics
Local parametric modeling
Mechanical models
Mechatronics
Modal analysis
Motion control

 To reference this document use:

http://resolver.tudelft.nl/uuid:8fe6849e-b95d-44ba-a03b-217552275d30

 DOI

https://doi.org/10.1016/j.mechatronics.2024.103158

 ISSN

0957-4158

 Source

Mechatronics, 99

 Part of collection

Institutional Repository

 Document type

journal article

 Rights

© 2024 Paul Tacx, Roel Habraken, Gert Witvoet, Marcel Heertjes, T.A.E. Oomen
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