Print Email Facebook Twitter Centimeter-scale nanomechanical resonators with low dissipation Title Centimeter-scale nanomechanical resonators with low dissipation Author Cupertino, A. (TU Delft Dynamics of Micro and Nano Systems) Shin, D. (TU Delft Team Georgy Filonenko) Guo, L.L. (TU Delft Team Marcel Sluiter) Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Bessa, M.A. (Brown University) Norte, R.A. (TU Delft QN/Groeblacher Lab; TU Delft Dynamics of Micro and Nano Systems; Kavli institute of nanoscience Delft) Date 2024 Abstract High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies – comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions. To reference this document use: http://resolver.tudelft.nl/uuid:98358852-dfb9-4da4-a487-d86ec97fe49b DOI https://doi.org/10.1038/s41467-024-48183-7 ISSN 2041-1723 Source Nature Communications, 15 (1) Part of collection Institutional Repository Document type journal article Rights © 2024 A. Cupertino, D. Shin, L.L. Guo, P.G. Steeneken, M.A. Bessa, R.A. Norte Files PDF s41467-024-48183-7.pdf 3.92 MB Close viewer /islandora/object/uuid:98358852-dfb9-4da4-a487-d86ec97fe49b/datastream/OBJ/view