Shack-Hartmann reflective micro profilometer

Shack-Hartmann reflective micro profilometer

Gong, H. (TU Delft Team Raf Van de Plas)
Soloviev, O.A. (TU Delft Team Raf Van de Plas)
Verhaegen, M.H.G. (TU Delft Team Raf Van de Plas)
Vdovin, Gleb (TU Delft Team Raf Van de Plas)

2017

We present a quantitative phase imaging microscope based on a Shack-Hartmann sensor, that directly reconstructs the optical path difference (OPD) in reflective mode. Comparing with the holographic or interferometric methods, the SH technique needs no reference beam in the setup, which simplifies the system. With a preregistered reference, the OPD image can be reconstructed from a single shot. Also, the method has a rather relaxed requirement on the illumination coherence, thus a cheap light source such as a LED is feasible in the setup. In our previous research, we have successfully verified that a conventional transmissive microscope can be transformed into an optical path difference microscope by using a Shack-Hartmann wavefront sensor under incoherent illumination. The key condition is that the numerical aperture of illumination should be smaller than the numerical aperture of imaging lens. This approach is also applicable to characterization of reflective and slightly scattering surfaces.

microscope
wavefront sensing
optical profilometer
phase imaging

http://resolver.tudelft.nl/uuid:ba213584-94b7-4c27-b413-a09fc4949914

https://doi.org/10.1117/12.2295688

0277-786X

Proceedings of SPIE - The International Society for Optical Engineering, 10616

International Conference on Optical Instruments and Technology, 2017-10-28 → 2017-10-30, Beijing, China

Institutional Repository

journal article

© 2017 H. Gong, O.A. Soloviev, M.H.G. Verhaegen, Gleb Vdovin