Modal analysis for density and anisotropic elasticity identification of adsorbates on microcantilevers

Journal article (2018)

Authors

P. Belardinelli Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
M. Siskins Kavli institute of nanoscience Delft, QN/Steeneken Lab - AS
M.K. Ghatkesar Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
F. Alijani Dynamics of Micro and Nano Systems - Mechanical, Maritime and Materials Engineering
Research Group
Dynamics of Micro and Nano Systems (Mechanical, Maritime and Materials Engineering) (TU Delft)
Copyright: © 2018 P. Belardinelli, L. M.F.R. Hauzer, M. Siskins, M.K. Ghatkesar, F. Alijani
DOI: https://doi.org/10.1063/1.5047279
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Published Date

2018

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Dynamics of Micro and Nano Systems

Abstract

Physical characteristics such as mass and stiffness of biological objects are emerging as new markers for severe diseases. Micromechanical resonators can be used to quantify multiple of these characteristics simultaneously. In this paper, we propose a methodology that utilizes higher flexural modes of vibration to perform simultaneous characterization of the density and elastic modulus of adsorbates. To demonstrate this concept, a polymeric block with a known dimension and anisotropy is written directly on the cantilever surface using a two-photon polymerization technique and characterised by modal analysis. Our method captures the effective bending stress exerted by non-isotropic materials which is masked in the atomic force microscopy indentation technique.