Print Email Facebook Twitter Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials Title Nanomechanical resonators fabricated by atomic layer deposition on suspended 2D materials Author Liu, Hanqing (TU Delft Dynamics of Micro and Nano Systems) Basuvalingam, Saravana B. (Eindhoven University of Technology) Lodha, S.V. (TU Delft Dynamics of Micro and Nano Systems; Indian Institute of Technology Bombay) Bol, Ageeth A. (University of Michigan) van der Zant, H.S.J. (TU Delft QN/van der Zant Lab; Kavli institute of nanoscience Delft) Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; Kavli institute of nanoscience Delft) Verbiest, G.J. (TU Delft Dynamics of Micro and Nano Systems) Date 2023 Abstract Atomic layer deposition (ALD), a layer-by-layer controlled method to synthesize ultrathin materials, provides various merits over other techniques such as precise thickness control, large area scalability and excellent conformality. Here we demonstrate the possibility of using ALD growth on top of suspended 2D materials to fabricate nanomechanical resonators. We fabricate ALD nanomechanical resonators consisting of a graphene/MoS2 heterostructure. Using atomic force microscope indentation and optothermal drive, we measure their mechanical properties including Young’s modulus, resonance frequency and quality factor, showing a lower energy dissipation compared to their exfoliated counterparts. We also demonstrate the fabrication of nanomechanical resonators by exfoliating an ALD grown NbS2 layer. This study exemplifies the potential of ALD techniques to produce high-quality suspended nanomechanical membranes, providing a promising route towards high-volume fabrication of future multilayer nanodevices and nanoelectromechanical systems. Subject atomic layer depositionnanomechanical resonatoroptomechanical driveQ factorresonance frequency To reference this document use: http://resolver.tudelft.nl/uuid:d4b69c62-ebab-451d-accf-95d1e33625e3 DOI https://doi.org/10.1088/2053-1583/acf58a ISSN 2053-1583 Source 2D Materials, 10 (4) Part of collection Institutional Repository Document type journal article Rights © 2023 Hanqing Liu, Saravana B. Basuvalingam, S.V. Lodha, Ageeth A. Bol, H.S.J. van der Zant, P.G. Steeneken, G.J. Verbiest Files PDF Liu_2023_2D_Mater._10_045023.pdf 1.08 MB Close viewer /islandora/object/uuid:d4b69c62-ebab-451d-accf-95d1e33625e3/datastream/OBJ/view