Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl2

Conference paper (2005)
Copyright: © 2005 Carlstrom, C.F.; Van Der Heijden, R.; Kok, A.M.; Van der Heijden, R.W.; Karouta, F.; Van Der Tol, J.J.G.M.; NÖtzel, R.; Van Veldhoven, P.J.; Salemink, H.W.M.
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2005

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2005 International Conference on Indium Phosphide and Related Materials

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