R. Nötzel

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Conference paper (1)

1 records found

Inductively coupled plasma etching of deep photonic crystal holes in InP using Cl2

Conference paper (2005) - C.F. Carlstrom (author), R. Van Der Heijden (author), A.M. Kok (author), R.W. Van der Heijden (author), F. Karouta (author), J.J.G.M. Van Der Tol (author), R. Nötzel (author), P.J. Van Veldhoven (author), H.W.M. Salemink (author)