Improved PECVD processed hydrogenated germanium films through temperature induced densification

Journal article (2022)

Authors

T. de Vrijer Photovoltaic Materials and Devices - EEMCS
Koos Roodenburg Student
A.H.M. Smets Photovoltaic Materials and Devices - EEMCS
Research Group
Photovoltaic Materials and Devices (EEMCS) (TU Delft)
Copyright: © 2022 T. de Vrijer, Julian E.C. van Dingen, Paul J. Roelandschap, Koos Roodenburg, A.H.M. Smets
DOI: https://doi.org/10.1016/j.mssp.2021.106285
Thin film PECVD Chemical stability Amorphous germanium Hydrogenated germanium Temperature densification
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Published Date

2022

Language

English

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Electrical Sustainable Energy

Research Group

Photovoltaic Materials and Devices

Abstract

Amorphous and nano-crystalline germanium is of potential interest for a wide range of electronic, optical, opto-electronic and photovoltaic applications. In this work the influence of deposition temperature on hydrogenated germanium (Ge:H) films was characterized, using over 200 Ge:H and over 70 SiGe:H films. The demonstrated temperature-induced densification of Ge:H films resulted in more stable films with a lower bandgap energy and dark conductivity and higher activation energy.