Silicon MEMS Micro-Evaporator

Master thesis (2009)

Authors

Contributors

M. Mihailovi? (mentor)
C.M. Rops (mentor)
J.F. Creemer (mentor)
P.M. Sarro (mentor)
Department
Microelectronics & Computer Engineering (EEMCS) (TU Delft)
Copyright: © 2009 Hao, J.
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Published Date

27-08-2009

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics & Computer Engineering