Print Email Facebook Twitter Pressure-induced nonlinear resonance frequency changes for extracting Young’s modulus of nanodrums Title Pressure-induced nonlinear resonance frequency changes for extracting Young’s modulus of nanodrums Author Sarafraz, A. (TU Delft Dynamics of Micro and Nano Systems) Givois, A.P.P. (TU Delft Dynamics of Micro and Nano Systems) Roslon, I.E. (TU Delft Dynamics of Micro and Nano Systems) Liu, Hanqing (TU Delft Dynamics of Micro and Nano Systems) Brahmi, Hatem (ASML) Verbiest, G.J. (TU Delft Dynamics of Micro and Nano Systems) Steeneken, P.G. (TU Delft Dynamics of Micro and Nano Systems; TU Delft QN/Steeneken Lab; Kavli institute of nanoscience Delft) Alijani, F. (TU Delft Dynamics of Micro and Nano Systems) Date 2023 Abstract The resonance frequency of ultra-thin layered nanomaterials changes nonlinearly with the tension induced by the pressure from the surrounding gas. Although the dynamics of pressurized nanomaterial membranes have been extensively explored, recent experimental observations show significant deviations from analytical predictions. Here, we present a multi-mode continuum model that captures the nonlinear pressure-frequency response of pre-tensioned membranes undergoing large deflections. We validate the model using experiments conducted on polysilicon nanodrums excited opto-thermally and subjected to pressure changes in the surrounding medium. We demonstrate that considering the effect of pressure on the nanodrum tension is not sufficient for determining the resonance frequencies. In fact, it is essential to also account for the change in the membrane’s shape in the pressurized configuration, the mid-plane stretching, and the contributions of higher modes to the mode shapes. Finally, we show how the presented high-frequency mechanical characterization method can serve as a fast and contactless method for determining Young’s modulus of ultra-thin membranes. Subject Experimental characterizationLarge deflectionsNonlinear pressure-frequency responseReduced-order modellingSuspended nanodrums To reference this document use: http://resolver.tudelft.nl/uuid:60ac95f2-0a58-4844-87a3-3bda01eda2bb DOI https://doi.org/10.1007/s11071-023-08660-y ISSN 0924-090X Source Nonlinear Dynamics: an international journal of nonlinear dynamics and chaos in engineering systems, 111 (16), 14751-14761 Part of collection Institutional Repository Document type journal article Rights © 2023 A. Sarafraz, A.P.P. Givois, I.E. Roslon, Hanqing Liu, Hatem Brahmi, G.J. Verbiest, P.G. Steeneken, F. Alijani Files PDF s11071_023_08660_y.pdf 1.21 MB Close viewer /islandora/object/uuid:60ac95f2-0a58-4844-87a3-3bda01eda2bb/datastream/OBJ/view