Airgap-based MEMS optical filters

For the ultraviolet-visible spectrum

Doctoral thesis (2016)

Authors

M. Ghaderi Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Copyright: © 2016 M. Ghaderi
DOI: https://doi.org/10.4233/uuid:7db0bc2e-9a7d-46fe-8108-2a63efcd3908
Residual stress Optical filter CMOS-compatible Silicon-based Air-gap optical filter
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Published Date

20-06-2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation