Print Email Facebook Twitter Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph Title Fabrication of an imaging diffraction grating for use in a MEMS-based optical microspectrograph Author Grabarnik, S. Emadi, A. Wu, H. De Graaf, G. Vdovin, G. Wolffenbuttel, R.F. Faculty Electrical Engineering, Mathematics and Computer Science Date 2008-05-13 To reference this document use: http://resolver.tudelft.nl/uuid:7f4bde6b-6ccf-4ee1-b318-536b90b5a756 Publisher IOP ISSN 0960-1317 Source Journal of Micromechanics and Microengineering, 18 (6), 2008 Part of collection Institutional Repository Document type journal article Rights (c) 2008 Grabarnik, S.; Emadi, A.; Wu, H.; De Graaf, G.; Vdovin, G.; Wolffenbuttel, R.F. Files PDF Fabrication of an imaging ... ograph.pdf 718.25 KB Close viewer /islandora/object/uuid:7f4bde6b-6ccf-4ee1-b318-536b90b5a756/datastream/OBJ/view