Aluminum Nitride and Chromium Nitride Thin Films for Strain Gauge Application

Master thesis (2010)

Authors

Contributors

P.M. Sarro (mentor)
H.A. Mol (mentor)
Programme
Microelectronics (EEMCS) (TU Delft)
Copyright: © 2010 Hou, Y.
Aluminum nitride Strain gauge Chromium nitride
More Info
expand_more

Published Date

19-07-2010

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Programme

Microelectronics