Surface-Micromachined Thermal Conductivity Gas Sensors For Hydrogen Detection

Title

Surface-Micromachined Thermal Conductivity Gas Sensors For Hydrogen Detection

Author

Chen, S.

Contributor

Wu, H. (mentor)
Wolffenbuttel, R.F. (mentor)

Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics & Computer Engineering

Date

2010-10-28

To reference this document use:

http://resolver.tudelft.nl/uuid:ade5368d-2dc0-4bd9-8c36-48171483c4ab

Part of collection

Student theses

Document type

master thesis

Rights

(c) 2010 Chen, S.