Strongly coupled modes in a weakly driven micromechanical resonator

Journal article (2012)

Authors

W.J. Venstra

R. Van Leeuwen

H.S.J. Van der Zant

Department

QN/Quantum Nanoscience () (TU Delft)

DOI: https://doi.org/doi:10.1063/1.4769182

Vibrations Frequency response Micromechanical resonators Amplitude modulation Beams (structures) Phase modulation

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Published Date

11-12-2012

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Source:

Applied Physics Letters, 101 (24), 2012

Faculty

Applied Sciences

Department

QN/Quantum Nanoscience

Abstract

We demonstrate a strong coupling between the flexural vibration modes of a clamped-clamped micromechanical resonator vibrating at low amplitudes. This coupling enables the direct measurement of the frequency response via amplitude- and phase modulation schemes using the fundamental mode as a mechanical detector. In the linear regime, a frequency shift of 0.8 Hz is observed for a mode with a line width of 5.8?Hz in vacuum. The measured response is well-described by the analytical model based on the Euler-Bernoulli beam including tension. Calculations predict an upper limit for the room-temperature Q-factor of 4.5×105 for our top-down fabricated micromechanical beam resonators.

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