Optimization of mesa etch for a quasi-vertical gan schottky barrier diode (Sbd) by inductively coupled plasma (icp) and device characteristics

The optimization of mesa etch for a quasi-vertical gallium nitride (GaN) Schottky barrier diode (SBD) by inductively coupled plasma (ICP) etching was comprehensively investigated in this work, including selection of the etching mask, ICP power, radio frequency (RF) power, ratio of mixed gas, flow rate, and chamber pressure, etc. In particular...

An opportunistic maintenance strategy for offshore wind turbine system considering optimal maintenance intervals of subsystems

Operation and maintenance (O&M) costs account for a large proportion of the total costs for offshore wind energy. Performing a reasonable maintenance strategy is an effective approach to reduce O&M costs and gain more profits. In this paper, an opportunistic maintenance strategy for offshore wind turbine systems considering...