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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)TiO2 is an interesting and promising material for micro-/nanoelectromechanical systems (MEMS/NEMS). For high performance and reliable MEMS/NEMS, optimization of the optical characteristics, mechanical stress, and especially surface smoothness of TiO2 is required. To overcome the roughness issue of the TiO2 films due to crystallization during...journal article 2012
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)We propose and experimentally demonstrate a reflectance-based photonic crystal (PC) liquid sensor. The PC is made of two-dimensional TiO2 nanopillar arrays. Such a reflectance-based structure with large functional area not only simplifies the optical guiding but also enhances the sensor signal. A linear shift of reflectance peaks is found for...journal article 2012
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Huang, Y. (author), Pandraud, G. (author), Sarro, P.M. (author)A promising concept for a photonic crystal sensor for liquid sensing applications is introduced. The two dimensional photonic crystals are fabricated using a recently developed Atomic layer deposition ARrays Defined by Etch-back technique (AARDE) to obtain large functional surfaces and dense pillar arrays. Photonic signals are collected by means...journal article 2011