Valles Sanclemente, S. (author), van der Meer, S.L.M. (author), Finkel, M. (author), Muthusubramanian, N. (author), Beekman, M.C. (author), Ali, H.A.S. (author), Ferreira Marques, J.M. (author), Zachariadis, C. (author), Veen, H.M. (author), Stavenga, T. (author), Haider, S.N. (author), DiCarlo, L. (author) We present the use of a set of airbridges to trim the frequency of microwave coplanar-waveguide (CPW) resonators post-fabrication. This method is compatible with the fabrication steps of conventional CPW airbridges and crossovers and increases device yield by allowing compensation of design and fabrication uncertainty with 100 MHz range and...
journal article 2023
