Characterization of internal quality factors in surface-treated and deep-etched superconducting CPW resonators

For quantum computing with superconducting qubits, fabricating transmon qubits with increased coherence time is crucial, especially in view of multi-qubit quantum processors. The fabrication process, geometries and materials used to fabricate a transmon qubit are similar to the fabrication of CPW resonators. However, due to shorter fabrication...