Yao, Z. (author), Yang, G. (author), Han, C. (author), Procel Moya, P.A. (author), Özkol, E. (author), Yan, J. (author), Zhao, Y. (author), Cao, L. (author), van Swaaij, R.A.C.M.M. (author), Mazzarella, L. (author), Isabella, O. (author) Passivating contacts are crucial for realizing high-performance crystalline silicon solar cells. Herein, contact formation by plasma-enhanced chemical vapor deposition (PECVD) followed by an annealing step is focused on. Poly-SiO<sub>x</sub> passivating contacts by combining plasma-assisted N<sub>2</sub>O-based oxidation of silicon (PANO-SiO...
journal article 2023
