Demonstration of spot size reduction by focussing amplitude modulated radially polarized light on a photoresist

Spot size reduction is demonstrated by printing focused spots from amplitude-modulated radially polarized light at the wavelength ? = 405 nm on a photoresist. Amplitude modulation is realized by ring illumination and by application of an optimized amplitude distribution function. Amplitude modulation is implemented via spatial light modulator,...

Radially Polarized Light for Detection and Nanolocalization of Dielectric Particles on a Planar Substrate

A fast noninvasive method based on scattering from a focused radially polarized light to detect and localize subwavelength nanoparticles on a substrate is presented. The technique relies on polarization matching in the far field between scattered and spurious reflected fields. Results show a localization uncertainty of ?10?4?2 is possible for a...