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Krieg, M.L. (author), Braat, J.J.M. (author)This paper will illustrate several approaches to retrieving the shape of aspherical reflective surfaces as used in EUV Lithography, from measurements from a previously reported angstrom-accuracy interferometer. First, the working principles of the interferometer will be reviewed, and typical measurement data expected from the instrument will be...conference paper 2004
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Krieg, M.L. (author), Braat, J.J.M. (author)A previously reported interferometer without intermediate optics is used to perform measurements on an aspherical extreme ultraviolet lithography mirror substrate. Acousto-optic modulation based phase shifting is used together with a novel phase retrieval algorithm to retrieve the phase distribution from our interferograms. The phase...conference paper 2005
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Ezzahiri, Sidi Mohamed (author), Nasif, Badia S. (author), Krieg, Jan (author), Bakker, Anco (author), Infante Ferreira, C.A. (author)The search for renewable energy sources is a wide area in which significant progress is still expected. This paper focuses on an energy system that uses Fresnel lenses to concentrate sunlight on a tubing system to heat up the working fluid. Fresnel lenses are lighter, thinner and cheaper to build than ordinary lenses. The model is designed to be...conference paper 2017