Rashidi, A. (author), Saccher, M. (author), Karuthedath, Cyril Baby (author), Sebastian, Abhilash Thanniyil (author), Savoia, Alessandro Stuart (author), Lavigne, Frederik (author), Stubbe, Frederic (author), Dekker, R. (author), Giagka, Vasiliki (author) Aluminum Nitride (AlN) Piezoelectric Micromachined Ultrasonic Transducers (PMUTs) are gaining interest for biomedical implant power due to biocompatibility and lowtemperature processing. However, due to the low piezoelectric coefficient of AlN PMUTs, storage capacitors are often used to accumulate ultrasonic power transferred over an extended...
conference paper 2023
