Saccher, M. (author), Schaijk, Rob van (author), Kawasaki, Shinnosuke (author), Klootwijk, Johan H. (author), Rashidi, A. (author), Giagka, Vasiliki (author), Savoia, Alessandro Stuart (author), Dekker, R. (author) Capacitive Micromachined Ultrasound Transducers (CMUTs) have many advantages compared to other ultrasonic transducer technologies, especially for implantable devices. However, they require a high bias voltage for efficient operation. To eliminate the need for an external bias voltage, a charge storage layer can be embedded in the dielectric....
conference paper 2023
