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Neklyudova, M. (author), Erdamar, A.K. (author), Vicarelli, L. (author), Heerema, S.J. (author), Rehfeldt, T. (author), Pandraud, G. (author), Koladouz Esfahani, Z. (author), Dekker, C. (author), Zandbergen, H.W. (author)
We present a technique to fabricate ultrathin (down to 20 nm) uniform electron transparent windows at dedicated locations in a SiN membrane for in situ transmission electron microscopy experiments. An electron-beam (e-beam) resist is spray-coated on the backside of the membrane in a KOH-etched cavity in silicon which is patterned using...
journal article 2017
Song, B. (author), Schneider, G.F. (author), Xu, Q. (author), Pandraud, G. (author), Dekker, C. (author), Zandbergen, H. (author)
Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.
journal article 2011