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Sun, J. (author), Hu, D. (author), Liu, Zewen (author), Middelburg, L.M. (author), Vollebregt, S. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A micro-scale pressure sensor based on suspended AlGaN/GaN heterostructure is reported with non-linear sensitivity. By sealing the cavity, vacuum sensing at various temperatures was demonstrated. To validate the proposed concept of the AlGaN/GaN vacuum sensor, a 700 µm diameter circular membrane was electrically characterized under applied...journal article 2020
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Alfaro Barrantes, J.A. (author), Mastrangeli, Massimo (author), Thoen, David (author), Bueno Lopez, J. (author), Baselmans, J.J.A. (author), Sarro, Pasqualina M (author)We describe a microfabrication process that, thanks to a specifically tailored sidewall profile, enables for the first-time wafer-scale arrays of high-aspect ratio through-silicon vias (TSVs) coated with DC-sputtered Aluminum, achieving at once superconducting and CMOS-compatible 3D interconnects. Void-free conformal coating of up to 500μm...conference paper 2020
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Waafi, Affan K. (author), Gaio, N. (author), Quiros Solano, W.F. (author), Dijkstra, Paul (author), Sarro, Pasqualina M (author), Dekker, R. (author)We present the first Organ-on-Chip equipped with a low-impedance Poly(3,4-ethylenedioxythiophene) polystyrene sulfonate (PEDOT:PSS) MicroElectrode Array (MEA). The novel device allows simultaneous mechanical stimulation with a stretchable PDMS membrane and electrical monitoring via the PEDOT:PSS MEA of multiple in vitro cell cultures. The...journal article 2020
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Jovic, A. (author), Losilla, Nuria Sanchez (author), Durá, Juan Sancho (author), Zinoviev, Kirill (author), Guivernau, Jose Luis Rubio (author), Margallo-Balbás, Eduardo (author), Mastrangeli, Massimo (author), Pandraud, G. (author), Sarro, Pasqualina M (author)In this work, we present the fabrication technology of a monolithically integrated photonic platform combining key components for optical coherence tomography (OCT) imaging, thereby including a photonic interferometer, a collimating lens, and a 45<sup>◦</sup> reflecting mirror that directs the light from the interferometer to the collimator....journal article 2020
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Motreuil-Ragot, P.A. (author), Hunt, A. (author), Kasi, Danesh (author), Brajon, B. (author), van den Maagdenberg, Arn M.J.M. (author), Orlova, Valeria (author), Mastrangeli, Massimo (author), Sarro, Pasqualina M (author)•Actuation has been succesfully performed for 2h30 with no side effects nor<br/>delimination of the human tissue <br/>•0.1 % strain has been achieved during the actutaion mode, close to the<br/>strain experienced in vivo by vSMCs <br/>•0.72 V/mm sensitivity has been shown on the sensing mode <br/>•Batch fabrication and downscaling will be...poster 2019
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Aydogmus, H. (author), Dostanic, M. (author), Jahangiri, M. (author), Sinha, Rajarshi (author), Quiros Solano, W.F. (author), Mastrangeli, Massimo (author), Sarro, Pasqualina M (author)Monitoring cell conditions and microenvironment in real time is crucial for Organ-on-Chip (OoC) functionality. In particular, biological cues such as ions, including metals and metabolites, play a critical role in physiology and homeostasis in the human body. • Real-time monitoring of ions without optical systems is an unmet need for OOCs [1]. •...poster 2019
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Dostanic, M. (author), Windt, Laura (author), Stein, Jeroen (author), van Meer, Berend (author), Mastrangeli, Massimo (author), Mummery, Christine (author), Sarro, Pasqualina M (author)We presented the smallest and best characterised EHT devices to date. The devices were fabricated by wafer-scale silicon and polymer processing, characterised by nanoindentation and finite-element simulations, and transferred to 96-well plates for cell seeding and optical tracking of bundle contraction. Cell bundles remained functional for at...poster 2019
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Sun, J. (author), Sokolovskij, R. (author), Iervolino, E. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)We developed an AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO<sub>3</sub>) nano-film modified gate for nitrogen dioxide (NO<sub>2</sub>) detection. The device has a suspended circular membrane structure and an integrated micro-heater. The thermal characteristic of the Platinum (Pt) micro-heater and the...journal article 2019
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Ramesha, Raghutham (author), Vollebregt, S. (author), Sarro, Pasqualina M (author)Graphene is an attractive material to be used for pressure sensors due to its thinness, electrical conductivity, and potential high gauge factor. One of the issues with processing graphene is the scalability, which is largely limited by the transfer process that is required for graphene deposited by chemical vapour deposition (CVD). In this...conference paper 2019
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Sun, J. (author), Zhan, Teng (author), Liu, Zewen (author), Wang, Junxi (author), Yi, Xiaoyan (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)This paper demonstrates a method to reduce the decay time in AlGaN/GaN photodetectors by a pulsed heating mode. A suspended AlGaN/GaN heterostructure photodetector integrated with a micro-heater is fabricated and characterized under ultraviolet illumination. We have observed that the course of persistent photoconductivity was effectively...journal article 2019
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Romijn, J. (author), Vollebregt, S. (author), van Zeijl, H.W. (author), Sarro, Pasqualina M (author)In this paper we present, for the first time, the successful monolithic wafer-scale integration of CVD graphene with CMOS logic for highly miniaturized smart sensing structures with on-chip readout electronics. The use of a patterned CMOS compatible catalyst for pre-defined regions of CVD graphene growth, and the transfer-free process used,...conference paper 2019
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Oliveira Rodrigues, F.J. (author), Ribeiro, J.F. (author), Anacleto, P.A. (author), Fouchard, A. (author), David, O. (author), Sarro, Pasqualina M (author), Mendez, P.M. (author)OBJECTIVE: As electrodes are required to interact with sub-millimeter neural structures, innovative microfabrication processes are required to enable fabrication of microdevices involved in such stimulation and/or recording. This requires the development of highly integrated and miniaturized systems, comprising die-integration-compatible...journal article 2019
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Sun, J. (author), Zhan, Teng (author), Liu, Zewen (author), Wang, Junxi (author), Yi, Xiaoyan (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A suspended WO<sub>3</sub>-gate AlGaN/GaN heterostructure photodetector integrated with a micro-heater is micro-fabricated and characterized for ultraviolet photo detection. The transient optical characteristics of the photodetector at different temperatures are studied. The 2DEG-based photodetector shows a recovery (170 s) time under 240 nm...journal article 2019
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Sun, J. (author), Sokolovskij, R. (author), Iervolino, E. (author), Santagata, F. (author), Liu, Zewen (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)A suspended AlGaN/GaN high electron mobility transistor (HEMT) sensor with a tungsten trioxide (WO 3 ) nanofilm modified gate was microfabricated and characterized for ppm-level acetone gas detection. The sensor featured a suspended circular membrane structure and an integrated microheater to select the optimum working temperature. High working...journal article 2019
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Ricciardella, F. (author), Vollebregt, S. (author), Kurganova, Evgenia (author), Giesbers, A.J.M. (author), Ahmadi, M. (author), Sarro, Pasqualina M (author)A method to grow multi layers graphene (MLG) just by thermal annealing in an inert atmosphere is reported. A molybdenum (Mo) catalyst layer is used in combination with a solid amorphous carbon (a-C) source on top or below the Mo layer. The formation of MLG directly on top of the catalyst substrate surface is confirmed by Raman spectroscopy,...journal article 2019
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Sarro, Pasqualina M (author), Serra, E. (author)Cavity optomechanics has achieved the major breakthrough of the preparation and observation of macroscopic mechanical oscillators in non-classical states. The development of reliable indicators of the oscillator properties in these conditions is important also for applications to quantum technologies. We compare two procedures to infer the...journal article 2019
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Ricciardella, F. (author), Polichetti, Tiziana (author), Vollebregt, S. (author), Alfano, Brigida (author), Massera, Ettore (author), Sarro, Pasqualina M (author)Limitations such as lack of detected stationary signal and slow signal recovery after detection currently affect graphene-based chemi-sensors operating at room temperature. In this work, we model the behavior of a sensor in a test chamber having limited volume and simulating the environmental conditions. From this model, we mathematically derive...journal article 2019
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Quiros Solano, W.F. (author), Gaio, N. (author), Silvestri, C. (author), Pandraud, G. (author), Dekker, R. (author), Sarro, Pasqualina M (author)Organ-on-chip (OOC) is becoming the alternative tool to conventional in vitro screening. Heart-on-chip devices including microstructures for mechanical and electrical stimulation have been demonstrated to be advantageous to study structural organization and maturation of heart cells. This paper presents the development of metal and polymeric...journal article 2019
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Zhang, B. (author), Wei, J. (author), Bottger, A.J. (author), van Zeijl, H.W. (author), Sarro, Pasqualina M (author), Zhang, Kouchi (author)We report the design, fabrication and experimental investigation of a MEMS micro-hotplate (MHP) for fast time-resolved X-ray diffraction (TRXRD) study of Cu nanoparticle paste (nanoCu paste) sintering process. The device and its system are designed to have a 60 ms minimum time interval, uniform temperature distribution and variant gas...conference paper 2019
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Chowdhury, A. (author), Vezio, P. (author), Bonaldi, M. (author), Borrielli, A. (author), Marino, F. (author), Morana, B. (author), Pandraud, G. (author), Pontin, A. (author), Sarro, Pasqualina M (author)We describe a method to control the cavity detuning in optomechanics experiments. This helps accurate measurements of the asymmetry in the motional sidebands, that testify the quantum behavior of the oscillator and quantifies its occupation number.conference paper 2019