Kinetics of tungsten low-pressure chemical-vapor deposition using WF6 and SiH4 studied by in situ growth-rate measurements

Graphene deposition on MEMS devices

MEMS devices are currently designed to avoid sliding and contacting parts due to friction and adhesion problems. In this work, the possibility to grow a low friction material locally on MEMS sidewalls is investigated. An overview of the lubricants proposed in the literature for the microscale is presented, and graphene is selected as a promising...

Low-humidity sensing properties of multi-layered graphene grown by chemical vapor deposition

Humidity sensing is fundamental in some applications, as humidity can be a strong interferent in the detection of analytes under environmental conditions. Ideally, materials sensitive or insensitive towards humidity are strongly needed for the sensors used in the first or second case, respectively. We present here the sensing properties of...

Dosed carbon precipitation and graphene layer number control on nickel micro-electromechanical systems surfaces

In this paper, we report on the in situ synthesis of graphene layers by means of chemical vapor deposition (CVD), directly on nickel micro-electromechanical systems (MEMS) surfaces. We have developed MEMS structures of which the temperature can be increased locally by Joule heating while in a methane environment. For our MEMS structures, the...

Mechanism of electronegativity heterojunction of nanometer amorphous-boron on crystalline silicon: An overview

The discovery of the extremely shallow amorphous boron-crystalline silicon heterojunction occurred during the development of highly sensitive, hard and robust detectors for low-penetration-depth ionizing radiation, such as ultraviolet photons and low-energy electrons (below 1 keV). For many years it was believed that the junction created by...

Influence of defect density on the gas sensing properties of multi-layered graphene grown by chemical vapor deposition

Chemical vapor deposition (CVD) has been demonstrated as a highly promising technique for the production of graphene on large scale and enabling tunability of the intrinsic defects of the films during the synthesis.<br/><br/>In this work, we report on the correlation between the density of defects (DoD) and the kinetics of interaction of multi...

Enhancing colloid stability of polymer microspheres in water through SiO₂ coating: Effects of coating cycles and surface coverage

In this study, we investigated the wettability and agglomeration characteristics of polymer microspheres coated with low-temperature deposited SiO₂ in a fluidized bed atomic layer deposition (ALD) setup. Surface characterization revealed the presence of a significant amount of deposited Si-OH groups within the first cycles. A...