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New ideas for two dimensional position sensitive silicon drift detectors

Hijzen, E.A. (author), Schooneveld, E.M. (author), van Eijk, C.W.E. (author), Hollander, R.W. (author), Sarro, P.M. (author), van den Bogaard, A. (author)

journal article 1994

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The development of a low-stress polysilicon process compatible with standard device processing

French, P.J. (author), van Drieenhuizen, B.P. (author), Poenar, D. (author), Goosen, J.F.L. (author), Mallee, R. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author)

journal article 1996

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Backside-illuminated silicon photodiode array for an integrated spectrometer

Kwa, T.A. (author), Sarro, P.M. (author), Wolffenbuttel, R.F. (author)

journal article 1997

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Technology and applications of micromachined silicon adaptive mirrors

Vdovin, G. (author), Middelhoek, S. (author), Sarro, P.M. (author)

The technology of low-cost high-quality micromachined adaptive mirrors is reported. Adaptive mirrors are fabricated by combining bulk silicon micromachining with standard electronics technologies. Mirrors with tens of control channels, having RMS initial deviation from plane of the order of ?/20 and a range of surface deflection of 10 to 20 ?m...

journal article 1997

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Electron confinement in multi-anode saw tooth silicon drift detectors with an anode pitch of 250 µm

Sonsky, J. (author), Valk, H. (author), Huizenga, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author)

journal article 1999

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Diminished electron cloud broadening in a silicon drift detector by sawtooth p+ strips

Sonsky, J. (author), Valk, H. (author), Allier, C.P. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author)

journal article 1999

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Thin photodiodes for a scintillator-silicon well detector

Allier, C.P. (author), Hollander, R.W. (author), Sarro, P.M. (author), Van Eijk, C.W.E. (author)

journal article 1999

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Scintillation light read-out by low-gain thin avalanche photodiodes in silicon wells

Allier, C.P. (author), Hollander, R.W. (author), Sarro, P.M. (author), de Boer, M. (author), van Eijk, C.W.E. (author)

journal article 2000

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X-ray detection with multi-anode sawtooth silicon drift detectors

Sonsky, J. (author), Huizenga, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author)

journal article 2000

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Multi-anode sawtooth SDD for X-ray spectroscopy fabricated on NTD wafers

Sonsky, J. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author), Kouchpil, V. (author)

journal article 2001

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IC-compatible two-level bulk micromachining process module for RF silicon technology

Sarro, P.M. (author), Ng, K.T. (author), Burghartz, J.N. (author)

journal article 2001

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Thin photodiodes for a neutron scintillator silicon-well detector

Allier, C.P. (author), Hollander, R.W. (author), van Eijk, C.W.E. (author), Sarro, P.M. (author), de Boer, M. (author), Czirr, J.B. (author), Chaminade, J.P. (author), Fouassier, C. (author)

journal article 2001

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Filter-protected photodiodes for high-throughput enzymatic analysis

Iordanov, V.P. (author), Bastemeijer, J. (author), Ishihara, R. (author), Sarro, P.M. (author), Bossche, A. (author), Vellekoop, M.J. (author)

journal article 2004

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Photoresist coating methods for the integration of novel 3-D RF microstructures

Boellaard, E. (author), Burghartz, J.N. (author), Sarro, P.M. (author)

journal article 2004

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Spray coating of photoresist for pattern transfer on high topography surfaces

Pham, N.P. (author), Burghartz, J.N. (author), Sarro, P.M. (author)

journal article 2005

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Evaluation of an Empirical Model to Estimate and Optimize Mechanical Properties of PECVD SiC Films

Pham, H.T.M. (author), De Boer, C.R. (author), Visser, C.C.G. (author), Sarro, P.M. (author)

In this paper, we present a systematic investigation of the influence of the deposition parameters on the deposition rate, etch rate, and mechanical stress of SiC films prepared by plasma-enhanced chemical vapor deposition (PECVD) technique. Among the relevant deposition parameters, the SiH4 gas flow rate, the main parameter to determine the Si...

journal article 2005

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Actuated elastomers with rigid vertical electrodes

Lau, G.K. (author), Goosen, J.F.L. (author), Van Keulen, F. (author), French, P.J. (author), Sarro, P.M. (author)

journal article 2006

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Lateral nano-Newton force-sensing piezoresistive cantilever for microparticle handling

Duc, T.C. (author), Creemer, J.F. (author), Sarro, P.M. (author)

journal article 2006

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In-package MEMS-based thermal actuators for micro-assembly

Henneken, V.A. (author), Tichem, M. (author), Sarro, P.M. (author)

journal article 2006

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Silicon micromachining of high aspect ratio, high-density through-wafer electrical interconnects for 3-D multichip packaging

Nguyen, N.T. (author), Wien, W.A.H. (author), Schellevis, H. (author), Sarro, P.M. (author), Burghartz, J.N. (author)

journal article 2006