Photoluminescence of combinatorically sputtered Al₂O₃–Y₂O₃ thin films with a Cr³⁺ and Nd³⁺ co-doping concentration gradient

The characterization of a wide range of luminescent thin films can be a long and tedious endeavor. With reactive combinatorial sputtering of multiple metal targets, it possible to fabricate thin films with a gradient in composition simply by not rotating the substrate. In this work, combinatorically sputtered thin films of Cr³⁺ and...