Through-focus phase retrieval and its connection to the spatial correlation for propagating fields

Through-focus phase retrieval methods aim to retrieve the phase of an optical field from its intensity distribution measured at different planes in the focal region. By using the concept of spatial correlation for propagating fields, for both the complex amplitude and the intensity of a field, we can infer which planes are suitable to retrieve...

Performance analysis of coherent optical scatterometry

Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer (the target) by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength...