Structured light assisted coherent fourier scatterometry for physical parameter retrieval of nanostructures

In the semiconductor industry, the minimumelement size has stepped into nanometer level. To keep the functionality of fabricated nanostructures, there is a huge demand of a technique that can provide non-destructive inspection and allow for in-line or in-situ monitoring during the manufacturing process. Optical scatterometry, which uses the far...

Investigation of coherent Fourier scatterometry as a calibration tool for determination of steep side wall angle and height of a nanostructure

Nanostructures with steep side wall angles (swa) play a pivotal role in various technological applications. Accurate characterization of these nanostructures is crucial for optimizing their performance. In this study, we propose a far-field detection method based on coherent Fourier scatterometry (CFS) for accurate quantification of steep swa...

Transversal optical singularity induced precision measurement of step-nanostructures

Optical singularities indicate zero-intensity points in space where parameters, such as phase, polarization, are undetermined. Vortex beams such as the Laguerre–Gaussian modes are characterized by a phase factor e^il^θ, and contain a phase singularity in the middle of its beam. In the case of a transversal optical...

Systematic decomposition of sequence determinants governing CRISPR/Cas9 specificity

The specificity of CRISPR/Cas9 genome editing is largely determined by the sequences of guide RNA (gRNA) and the targeted DNA, yet the sequence-dependent rules underlying off-target effects are not fully understood. To systematically explore the sequence determinants governing CRISPR/Cas9 specificity, here we describe a dual-target system to...

Variation Regularity and Measurement of Zero-Sequence Inductance of Fractional Slot Concentrated Winding PMSMs

The zero-sequence inductance is a vital parameter for the performance analysis of permanent magnet machines, especially under faulty conditions or in open-winding machines. This paper focuses on the zero-sequence inductance calculation of fractional slot concentrated winding permanent magnet synchronous machines (FSCW-PMSMs), and reveals the...

Optical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry

Accurate determination of the physical parameters of nanostructures from optical far-field scattering is an important and challenging topic in the semiconductor industry. Here, we propose a novel metrology method to determine simultaneously the height and side-wall angle of a step-shaped silicon nanostructure. By employing an optical singular...

Plasmonic tweezers: for nanoscale optical trapping and beyond

Optical tweezers and associated manipulation tools in the far field have had a major impact on scientific and engineering research by offering precise manipulation of small objects. More recently, the possibility of performing manipulation with surface plasmons has opened opportunities not feasible with conventional far-field optical methods....

Determination of steep sidewall angle using polarization-sensitive asymmetric scattering

The sidewall angle (SWA) of a nanostructure exerts influence on the performance of the nanostructure and plays an important role in processing nano-structural chips. It is still a great challenge to determine steep SWAs from far field measurements especially when the SWAs are close to 90°. Here, we propose a far-field detection system to...

Superresolution effect due to a thin dielectric slab for imaging with radially polarized light

Improving the image quality of small particles is a classic problem and especially challenging when the distance between particles are below the optical diffraction limit. We propose a imaging system illuminated with radially polarized light combined with a suitable substrate that contains a thin dielectric layer to demonstrate that the...

Pancharatnam–Berry phase shaping for control of the transverse enhancement of focusing

We show that elongating a tightly focused field in the direction perpendicular to the optical axis is possible. We demonstrate our approach by specially shaping the Pancharatnam–Berry (PB) phase. Moreover, the analytical formulae required to calculate the strength vectors and energy flux of the three-dimensional electromagnetic fields near...

Driving Magnetostructural Transitions in Layered Intermetallic Compounds

We report the dramatic effect of applied pressure and magnetic field on the layered intermetallic compound Pr0.5Y0.5Mn2Ge2. In the absence of pressure or magnetic field this compound displays interplanar ferromagnetism at room temperature and undergoes an isostructural first order magnetic transition (FOMT) to an antiferromagnetic state below...