Prodanovic, V. (author), Chan, H.W. (author), Smedley, J. (author), Theulings, A. (author), Tao, S. (author), Van der Graaf, H. (author), Sarro, P.M. (author) The excellent overall properties of silicon nitride, particularly its mechanical strength and resistance to many etchants, make it a widely used material for microsensors and microactuators. In this paper silicon-rich silicon nitride (SRN) films were investigated as material for ultra-thin transmission dynodes in electron multiplication. These...
journal article 2015
