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Ayerden, N.P. (author), de Graaf, G. (author), Wolffenbuttel, R.F. (author)A miniaturized methane (CH4) sensor based on nondispersiveinfrared absorption is realized in MEMS technology. A high level offunctional integration is achieved by using the resonance cavity of a linearvariable optical filter (LVOF) also as a gas absorption cell. For effectivedetection of methane at λ = 3.39 µm, an absorption path length of at...journal article 2016
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Karimi Shahmarvandi, Ehsan (author), Ghaderi, M. (author), Ayerden, N.P. (author), de Graaf, G. (author), Wolffenbuttel, R.F. (author)The design of a metamaterial-based absorber for use in a mid-IR microspectrometer-based gas sensor is reported.The microspectrometer consists of a linear variable optical filter (LVOF) that is aligned with an array of thermopiledetectors, which is fabricated on a SiN membrane and covered with the absorber. Special emphasis was put on theCMOS...journal article 2016