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Verma, N. (author), Delhez, R. (author), van der Pers, N.M. (author), Hendrikx, R.W.A. (author), Huizenga, R.M. (author), Bottger, A.J. (author)
For Pd thin films, microstructural changes involved during hydrogen cycling provide the information needed to predict and optimize the film's mechanical strength. In this paper, a systematic study of the morphology, microstructure, texture, and stress has been performed on Pd thin films during hydrogen loading and deloading cycles at room...
journal article 2022
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Verma, N. (author), Delhez, R. (author), van der Pers, N.M. (author), Tichelaar, F.D. (author), Bottger, A.J. (author)
In this work, we studied the mechanical and thermal stability of ~100 nm Pd thin films magnetron sputter deposited on a bare oxidized Si(100) wafer, a sputtered Titanium (Ti) intermediate layer, and a spin-coated Polyimide (PI) intermediate layer. The dependence of the film stability on the film morphology and the film-substrate interaction...
journal article 2021