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Bos, Boy Gustaaf Cornelis (author), Thoen, David (author), Haalebos, E. A.F. (author), Gimbel, P. M.L. (author), Klapwijk, T.M. (author), Baselmans, J.J.A. (author), Endo, A. (author)The superconducting critical temperature (T-\mathrm{c} > 15 K) of niobium titanium nitride (NbTiN) thin films allows for low-loss circuits up to 1.1 THz, enabling on-chip spectroscopy and multipixel imaging with advanced detectors. The drive for large-scale detector microchips is demanding NbTiN films with uniform properties over an...journal article 2017