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van Kessel, L.C.P.M. (author), Huisman, T. (author), Hagen, C.W. (author)Line-edge roughness (LER) is often measured from top-down critical dimension scanning electron microscope (CD-SEM) images. The true three-dimensional roughness profile of the sidewall is typically ignored in such analyses. We study the response of a CD-SEM to sidewall roughness (SWR) by simulation. We generate random rough lines and spaces,...conference paper 2020