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Tran, A.T. (author), Schellevis, H. (author), Pham, H.T.M. (author), Shen, C. (author), Sarro, P.M. (author)Aluminum Nitride thin films with the desired properties for piezoelectric actuators are grown by pulsed DC sputtering on Si (100) substrates coated with different seed layers (Al/1%Si, Mo, Ti). The influence of sputtering parameters and the seed layers on crystallinity and orientation of the AlN films is investigated. Raman spectroscopy...journal article 2010