Methods for optical modeling and cross-checking in ellipsometry and scatterometry

Demonstration of an optimised focal field with long focal depth and high transmission obtained with the Extended Nijboer-Zernike theory

In several optical systems, a specific Point Spread Function (PSF) needs to be generated. This can be achieved by shaping the complex field at the pupil. The Extended Nijboer-Zernike (ENZ) theory relates complex Zernike modes on the pupil directly to functions in the focal region. In this paper, we introduce a method to engineer a PSF using the...

Through-focus phase retrieval and its connection to the spatial correlation for propagating fields

Through-focus phase retrieval methods aim to retrieve the phase of an optical field from its intensity distribution measured at different planes in the focal region. By using the concept of spatial correlation for propagating fields, for both the complex amplitude and the intensity of a field, we can infer which planes are suitable to retrieve...

Interferometric coherent Fourier scatterometry: a method for obtaining high sensitivity in the optical inverse-grating problem

Experimental techniques for aberration retrieval with through-focus intensity images

Measurement techniques to determine the aberration of an optical system, by obtaining through-focus intensity images that are produced when the object is a point source at infinity, are shown. The analysis of the aberrations is made using the extended version of the Nijboer-Zernike diffraction theory. This theory provides a semi analytical...

Performance analysis of coherent optical scatterometry

Scatterometry is a well established technique currently utilized in research, as well as in industrial applications, to retrieve the properties of a given scatterer (the target) by looking at how the light coming from a certain source is diffracted in the far field. Currently the light source is often a discharge lamp that, after wavelength...