el Mansouri, B. (author), Middelburg, L.M. (author), Poelma, René H. (author), Zhang, Kouchi (author), van Zeijl, H.W. (author), Wei, J. (author), Jiang, H. (author), Vogel, J.G. (author), van Driel, W.D. (author) Commercially available gravimeters and seismometers can be used for measuring Earth’s acceleration at resolution levels in the order of ng∕Hz (where g represents earth’s gravity) but they are typically high-cost and bulky. In this work the design of a bulk micromachined MEMS device exploiting non-linear buckling behaviour is described, aiming...
journal article 2019
