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Ouyang, B. (author), Li, Yanlu (author), Kruidhof, Marten (author), Horsten, R.C. (author), Baets, Roel (author), van Dongen, K.W.A. (author), Caro-Schuurman, J. (author)We report a highly sensitive ultrasound sensor based on an integrated photonics silicon Mach-Zehnder interferometer (MZI). One arm of the MZI is located on a thin membrane, acting as the sensing part of the device. Ultrasound waves excite the membrane's vibrational mode, thus inducing modulation of the MZI transmission. The measured sensor...conference paper 2020
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Latkowski, S (author), Van Veldhoven, P. J. (author), Hänsel, A. (author), D'Agostino, D. (author), Rabbani-Haghighi, H. (author), Docter, B. (author), Bhattacharya, N. (author), Thijs, P. J A (author), Ambrosius, H. P M M (author), Smit, M (author), Williams, KA (author), Bente, E.A.J.M. (author)In this paper a generic monolithic photonic integration technology platform and tunable laser devices for gas sensing applications at 2 μm will be presented. The basic set of long wavelength optical functions which is fundamental for a generic photonic integration approach is realized using planar, but-joint, active-passive integration on...conference paper 2017