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Silvis-Cividjian, N. (author), Hagen, C.W. (author), Kruijt, P. (author), Van der Stam, M.A.J. (author), Groen, H.B. (author)
Electron-beam-induced deposition (EBID) is a potentially fast and resistless deposition technique which might overcome the fundamental resolution limits of conventional electron-beam lithography. We advance the understanding of the EBID process by simulating the structure growth. The merit of our model is that it explains the shapes of...
journal article 2003