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De Rooij-Lohmann, V.I.T.A. (author), Veldhuizen, L.W. (author), Zoethout, E. (author), Yakshin, A.E. (author), Van de Kruijs, R.W.E. (author), Thijsse, B.J. (author), Gorgoi, M. (author), Schäfers, F. (author), Bijkerk, F. (author)To enhance the thermal stability, B4C diffusion barrier layers are often added to Mo/Si multilayer structures for extreme ultraviolet optics. Knowledge about the chemical interaction between B4C and Mo or Si, however is largely lacking. Therefore, the chemical processes during annealing up to 600?°C of a Mo/B4C/Si layered structure have been...journal article 2010
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Shamsutdinov, N.R. (author), Sloof, W.G. (author), Böttger, A.J. (author)A method is presented to determine the photoelectron surface core-level shift (SCLS) of 3d transition metals using x-ray photoelectron spectroscopy. The experimental difficulties arising from the relatively large broadening of photoemission lines in the 3d transition series can be overcome by the analysis of the angular dependence of...journal article 2005