Energy-Efficient Capacitive-Sensor Interfaces

This thesis describes the theory, design and realization of energy-efficient capacitive-sensor interfaces that are dedicated to energy-constrained applications. The goal of this work is to explore energy-efficient capacitive-sensor interface design techniques both at the system and the circuit level.

Ultra thin films for sensing and heating of microprobes

This dissertation aims to advance the current state of cantilevers with integrated metal thermal and deflection sensing elements. Metallic sensing elements enable the use of alternative substrate materials (such as polymers), that tend to exhibit higher compliance properties and are more robust (less brittle) compared to Si or Si3N4 cantilevers....

Capacitive Sensor Interface Using an Inverter-Based Period Modulator

This thesis discusses the basic principles, circuit implementation and measurements of an inverter-based capacitive-sensor interface based on period modulation. The interface employs an inverter-based OTA and comparator to increase the current efficiency. Moreover, it applies new circuit techniques to reduce the die size and to reduce noise. A...