Air-based contactless wafer precision positioning system: Contactless sensing using charge coupled devices

This paper presents the development of a contactless sensing system and the dynamic evaluation of an air-bearing based precision wafer positioning system. The contactless positioning stage is a response to the trend seen in the high-tech industry, where the substrates are becoming thinner and larger to reduce the cost and increase the yield....

Air-Based Contactless Wafer Precision Positioning System

This paper presents the development of a contactless sensing system and the dynamic evaluation of an air-bearing-based precision wafer positioning system. The contactless positioning stage is a response to the trend seen in the high-tech industry, where the substrates are becoming thinner and larger to reduce the cost and increase the yield....

Design of a passive alternative for long stroke linear aerostatic stages based on ferrofluid bearings

The objective of this research is to demonstrate the capability of a long stroke linear ferrofluid (FF) stage. This stage is a passive alternative to existing linear aerostatic stages and can be used in low loaded CNC devices, pick and place machines, microscopy or scanner applications. To compete with aerostatic stages the bearing must be...

Design considerations for ferrofluid pressure bearing pads

The novel contribution of this research is insight into the influence of different parameters in the magnet configurations on the load and stiffness of a ferrofluid pressure bearing. It is shown that magnets with a small cross-section magnetized alternatively up and downwards combine a high load capacity and moderate stiffness while being low...