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de Vrijer, T. (author), Bouazzata, Bilal (author), Smets, A.H.M. (author)Semiconductors based on group IV elements are widely used in the fields of micro-electronics, optics and photonics. The group IV alloys are processed using plasma enhanced chemical vapor deposition and its opto-electrical properties are a result of the material composition and structure. Infrared and Raman spectroscopy are complementary and...journal article 2022