Design and Integration of Graphene Sensors with Read-Out Electronics: A Graphene-Based Pirani Pressure Sensor Integrated with the BICMOS Process

In this research work, efforts have been made to successfully integrate graphene in a standard CMOS fabrication process without the need for wafer-to-wafer transferring. For this purpose, a graphene-based Pirani sensor is integrated in the BICMOS process. Two batches of graphene-based Pirani sensors are characterized, resulting in world’s first...