A 19.8-mW Eddy-Current Displacement Sensor Interface with Sub-Nanometer Resolution

This paper presents an eddy-current sensor (ECS) interface intended for sub-nanometer (sub-nm) displacement sensing in hi-tech applications. The interface employs a 126-MHz excitation frequency to mitigate the skin effect, and achieve high resolution and stability. An efficient on-chip sensor offset compensation scheme is introduced which...

Suppression Efficiency of the Correlated Noise and Drift of Self-oscillating Pseudo-differential Eddy Current Displacement Sensor

The suppression efficiency of the correlated noise and drift of self-oscillating front-end circuit in a pseudo-differential eddy-current displacement sensor (ECDS) is investigated using COMSOL and MATLAB. The transfer characteristic of the sensor coil, excited at 200 MHz, is obtained through a FE model in COMSOL. The characteristic is linearized...

Design, Fabrication and Characterization of a MEMS Thermal Displacement Sensor

This thesis is a part of the CLEMPS (Closed Loop Embedded MEMS-based Precision Stage) project. Within this project a MEMS-stage should be positioned using a feedback (displacement) signal with 10-nm accuracy over a 100 ?m range. This thesis investigates if thermal sensing can be used as a reliable sensing mechanism within the CLEMPS project....