A MEMS Coriolis-Based Mass-Flow-to-Digital Converter for Low Flow Rate Sensing

This article presents a microelectromechanical system (MEMS) Coriolis-based mass-flow-to-digital converter (Φ DC) that can be used with both liquids and gases. It consists of a micromachined Coriolis mass flow sensor and a CMOS interface circuit that drives it into oscillation and digitizes the resulting mass flow information. A phase-locked...

A Low-Field Portable Nuclear Magnetic Resonance (NMR) Microfluidic Flowmeter

This paper presents a portable and contactless microfluidic flowmeter based on the Nuclear Magnetic Resonance (NMR) principle, which can measure flow rates up to 2.7 ml/min with \pm 16\ lmin (±0.6% full-scale) error. It consists of a millimeter-size RF coil wound around a microfluidic channel, custom readout electronics and a 0.5 T permanent...