Gas-phase Deposition of Thin Aluminium Oxide Films at Ambient Conditions

Particles are widely used in the chemical industry as raw material and end product. In many applications of particles, it is advantageous to give them a coating that can either protect the particle from outside influences or give it an additional function. Technologies to provide micron-sized particles with relatively thick coatings (in the...

Gas-Phase Deposition of Ultrathin Aluminium Oxide Films on Nanoparticles at Ambient Conditions

We have deposited aluminium oxide films by atomic layer deposition on titanium oxide nanoparticles in a fluidized bed reactor at 27 ± 3 °C and atmospheric pressure. Working at room temperature allows coating heat-sensitive materials, while working at atmospheric pressure would simplify the scale-up of this process. We performed 4, 7 and 15...